SFM6000D-5SLM is a digital mass flow controller. This measures gas mass flow by the calorimetric principle based on heat transfer. A heater element on a thermally insulated membrane and two thermopiles up-stream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured. The measurement area as well as the A/D converter and further signal processing are based on a single chip using CMOS standard processes. Moreover, the same chip also takes over the function of a microprocessor in a standard mass flow controller, directly regulating the valve.
- 5 - 0.01slm flow range
- Disruptive concept combining plastic body and highly integrated electronics
- Small form factor and low weight
- High accuracy/repeatability (2% / 0.2% of set point)
- Wide control range (500:1), ultra-fast settling time (100ms)
- RS485 and I²C digital interface
- Exchangeable 6mm push-in and down mount connectors
- NIST traceable calibration
- No drift and no re-calibration required in the field
- NIST traceable calibration
Product details
| Flow Rate:
5l/min
|
| Flow Rate Max:
-
|
| Pressure Max:
10bar
|
| Supply Voltage DC Min:
22.8V
|
| Supply Voltage DC Max:
25.2V
|
| Port Style:
Push-In Tube
|
| Accuracy %:
0.2%
|
| Product Range:
CMOSens SFM6000D Series
|
Other details
| Brand |
SENSIRION |
| Part Number |
SFM6000D-5SLM |
| Quantity |
Each |
| Technical Data Sheet EN |
 |
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